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Logo: Hannover Center of Mechatronics/Leibniz Universität Hannover
Logo Leibniz Universität Hannover
Logo: Hannover Center of Mechatronics/Leibniz Universität Hannover
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Active Micro-optics

Researcher:IMPT
Duration:sincs 2009
Funded by:DFG
Bild Aktive Mikrooptiken Bild Aktive Mikrooptiken

Bild Aktive Mikrooptiken

Within the framework of the project „Electromagnetic Actuation of Micro-optics: Adaptive Systems on the basis of Ferro fluidic Actuators“ of the SPP 1337 „Active Micro-optics“, the Institute of Micro Production Technology (IMPT) deals with the design and production of a micro actuator. By excitation of the micro coil array as part of the micro actuator, an electromagnetic field is induced, displacing a ferrofluid in a micro channel. By moving the electromagnetic liquid body, an optically active liquid is displaced within the fine micro channel structures made of PMMA. To model the micro coil array, FEM analyses were successfully carried out for simulation of the magnetically excited field and the temperature. From the simulation results, the design for the lithographic photo masks was derived. Then a process chain was developed for the micro actuator production, and the corresponding thin-film processes were optimised. In the meantime, the first actuators have already been produced, and the experiences gained have been used for design optimisation. The first optimised micro actuators are now completed and under test. In the subsequent system integration phase, two micro actuators form a sandwich structure with the micro channel structure in the middle.

 

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