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Logo: Hannover Center of Mechatronics/Leibniz Universität Hannover
Logo Leibniz Universität Hannover
Logo: Hannover Center of Mechatronics/Leibniz Universität Hannover
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IMPT - Institute of Micro Production Technology

The research activities of the Institute of Micro Production Technology mainly focus on the design and production of micro mechatronic actuators and sensors (MEMS – micro electromechanical systems), the mechanical processing and characterisation of MEMS and MEMS materials as well as on the determination and adaptation of tribological features. Development activities reach from magnetic field sensors for use in macro mechatronic systems (motors, boring heads), over length measuring systems and micro motors used in micro positioners, actuators for manipulation of micro optical lens systems, towards biomedical applications, for example for hearing recovery. 

To pursue their research activities, the scientific and technical staff of the IMPT can rely on a well-equipped class 100 clean room to realise micro technological manufacturing processes and analyses of mechatronic MEMS. In addition, the IMPT disposes of research laboratories for the mechanical processing and characterisation by measurements of micro mechatronic systems and materials.

IMPT Core Competences

The IMPT core competences to carry out the aforementioned research activities can be classified as follows:

  • Thin-film technology
  • Mechanical micro processing
  • Packaging and layout methods
  • Micro tribology

Thin-film Technology

To create mechatronic micro systems by means of thin-film technology, the following processes can be carried out at the IMPT (extract):

  • Photo lithography

    • Positive and negative resist processes
    • Mask alignment and exposure
    • Spray or dip developing

  • Coating

    • Cathode evaporation
    • Vaporisation
    • Chemical vapour deposition (CVD/PECVD)
    • Galvanics

  • Etching

    • Wet chemical – caustic potash (KOH), hydrofluoric acid (HF)
    • Dry etching – ion beam etching (IBE), focused ion beam etching (FIB), deep reactive ion etching (RIE/DRIE)
    • Plasma ashing

Mechanical Micro Processing

  • Abrasive cutting and profile grinding for high-precision separation and profiling of micro components made of ceramics, glass and silicon to obtain high-precision geometries of micro mechatronic components

  • Nano grinding and lapping for high-precision surface finishing of brittle-hard materials and creation of grinding patterns

  • High-quality surfaces by means of polishing and chemical mechanical polishing (CMP)

  • Processing and planarisation of wafer surfaces made of mixed materials by means of CMP

Packaging and Layout Methods

Finetech Fineplacer
  • Glass soldering for bonding of ceramics – The soldered connections as well as the ceramics are chemically inert.
  • Development of manufacturing processes for complex components
  • Mounting of micro actuators for various micro mechanical systems

Micro Tribology

  • Wear measurements on a rotary wear test rig according to the Pin on Disk method for plane micro contact
  • Measurement of micro hardness and elastic modulus of thin films, crack measurement
  • Analysis of friction forces for micro contacts, e.g. interaction of read-write heads with a hard disk surface
  • Adhesion as well as acoustic emission

Concepts

  • The IMPT works out concepts for further education programs of prospective students coming from technical disciplines like mechatronics (technicians, foremen) who want to study on second-chance education.
  • We can rely on a long-term experience in this field, providing advisory support according to your specific demands.

Technical Equipment (Extract)

  • Mask alignment and exposure
  • Galvanic deposition
  • Cathode evaporation and magnetron cathode evaporation
  • Vaporisation
  • PECVD – plasma-enhanced chemical vapour deposition (DLC, silicon dioxide and nitride)
  • Wet chemical etching, plasma etching (PE), ion beam etching (IBE), deep reactive ion etching (DRIE)
  • Focused ion beam system (FIB)
  • Interferometry (white light, laser Doppler vibrometer)
  • Optical microscopy, Kerr microscopy
  • Scanning electron microscopy and EDX material analyses
  • Scanning force microscopy
  • Stylus instrument
  • Measurement of micro hardness and elastic modulus of thin films by means of nano indentation
  • Abrasive cutting and profile grinding
  • Nano grinding, lapping and chemical mechanical polishing (CMP)
  • Glass soldering for bonding of ceramics
  • Anodic bonding and ultrasonic bonding
  • Rotary wear test rig

Institute of Micro Production Technology – Contact Information

Prof. Dr.-Ing. Lutz Rissing

IMPT - Institute of Micro Production Technology
Leibniz Universität Hannover
An der Universität 2
30823 Garbsen

Phone: +49 511 762 5104
Fax: +49 511 762 2867
E-mail: rissingimpt.uni-hannover.de